2 results
Deposition of tungsten on silicon dioxide by GeH4 reduction of WF6
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 93
- Print publication:
- 1992
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Evolution of Intrinsic Stress During Nucleation and Growth of Polycrystalline Tungsten Films by Chemical Vapor Deposition.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 239 / 1991
- Published online by Cambridge University Press:
- 22 February 2011, 139
- Print publication:
- 1991
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